====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
  Layer # 1- Si = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   297.0E+02 A   Straggling =   348.6E+01 A
 Ion Lateral Range =   316.0E+01 A   Straggling =   395.5E+01 A
 Ion Radial  Range =   496.0E+01 A   Straggling =   267.4E+01 A
====================================================================
 Range Skewne- = -001.0351  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.2724  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Si    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
400010.E-03  0.0000E+00  6.8403E+06
800010.E-03  0.0000E+00  8.3770E+06
120001.E-02  0.0000E+00  8.1460E+06
160001.E-02  0.0000E+00  8.7583E+06
200001.E-02  0.0000E+00  1.0522E+07
240001.E-02  0.0000E+00  1.0514E+07
280001.E-02  0.0000E+00  9.8495E+06
320001.E-02  0.0000E+00  9.9125E+06
360001.E-02  0.0000E+00  1.0121E+07
400001.E-02  0.0000E+00  1.0985E+07
440001.E-02  0.0000E+00  9.7760E+06
480001.E-02  0.0000E+00  1.0345E+07
520001.E-02  0.0000E+00  1.2049E+07
560001.E-02  0.0000E+00  1.0669E+07
600001.E-02  0.0000E+00  1.1096E+07
640001.E-02  0.0000E+00  1.2777E+07
680001.E-02  0.0000E+00  1.3150E+07
720001.E-02  0.0000E+00  1.3793E+07
760001.E-02  0.0000E+00  1.2659E+07
800001.E-02  0.0000E+00  1.3431E+07
840001.E-02  0.0000E+00  1.3067E+07
880001.E-02  2.5000E+02  1.3138E+07
920001.E-02  0.0000E+00  1.4333E+07
960001.E-02  0.0000E+00  1.3530E+07
100000.E-01  2.5000E+02  1.3209E+07
104000.E-01  0.0000E+00  1.4115E+07
108000.E-01  0.0000E+00  1.6358E+07
112000.E-01  0.0000E+00  1.5947E+07
116000.E-01  2.5000E+02  1.6676E+07
120000.E-01  5.0000E+02  1.6247E+07
124000.E-01  2.5000E+02  1.5751E+07
128000.E-01  0.0000E+00  1.5630E+07
132000.E-01  0.0000E+00  1.6296E+07
136000.E-01  0.0000E+00  1.7583E+07
140000.E-01  0.0000E+00  1.9903E+07
144000.E-01  0.0000E+00  1.9030E+07
148000.E-01  0.0000E+00  1.8844E+07
152000.E-01  0.0000E+00  1.8231E+07
156000.E-01  0.0000E+00  1.8904E+07
160000.E-01  2.5000E+02  2.0415E+07
164000.E-01  2.5000E+02  2.1251E+07
168000.E-01  2.5000E+02  2.0708E+07
172000.E-01  2.5000E+02  2.0780E+07
176000.E-01  0.0000E+00  2.2745E+07
180000.E-01  0.0000E+00  2.3931E+07
184000.E-01  0.0000E+00  2.4376E+07
188000.E-01  7.5000E+02  2.4818E+07
192000.E-01  2.5000E+02  2.5877E+07
196000.E-01  0.0000E+00  2.7320E+07
200000.E-01  5.0000E+02  2.8231E+07
204000.E-01  7.5000E+02  2.8303E+07
208000.E-01  1.0000E+03  3.0083E+07
212000.E-01  7.5000E+02  3.1778E+07
216000.E-01  7.5000E+02  3.1982E+07
220000.E-01  1.0000E+03  3.5838E+07
224000.E-01  1.5000E+03  3.7361E+07
228000.E-01  1.2500E+03  3.6531E+07
232000.E-01  1.5000E+03  3.5852E+07
236000.E-01  3.0000E+03  3.9391E+07
240000.E-01  1.5000E+03  3.9079E+07
244000.E-01  1.7500E+03  3.9460E+07
248000.E-01  3.0000E+03  4.2511E+07
252000.E-01  3.2500E+03  4.2576E+07
256000.E-01  2.7500E+03  4.3713E+07
260000.E-01  3.2500E+03  4.3302E+07
264000.E-01  5.5000E+03  4.4984E+07
268000.E-01  5.5000E+03  4.8166E+07
272000.E-01  5.2500E+03  4.9924E+07
276000.E-01  7.0000E+03  5.1293E+07
280000.E-01  1.0500E+04  5.1644E+07
284000.E-01  9.5000E+03  5.0982E+07
288000.E-01  1.1000E+04  5.2701E+07
292000.E-01  9.5000E+03  4.9582E+07
296000.E-01  1.0750E+04  4.7694E+07
300000.E-01  1.1000E+04  4.8104E+07
304000.E-01  1.2500E+04  4.8542E+07
308000.E-01  1.3500E+04  4.1511E+07
312000.E-01  1.3750E+04  3.9743E+07
316000.E-01  1.5000E+04  3.5117E+07
320000.E-01  1.3750E+04  3.2483E+07
324000.E-01  1.2250E+04  2.6190E+07
328000.E-01  1.1250E+04  2.2547E+07
332000.E-01  1.0500E+04  1.8615E+07
336000.E-01  7.2500E+03  1.3419E+07
340000.E-01  9.2500E+03  1.1121E+07
344000.E-01  3.5000E+03  7.0428E+06
348000.E-01  4.5000E+03  5.6365E+06
352000.E-01  1.7500E+03  3.7920E+06
356000.E-01  2.2500E+03  2.4813E+06
360000.E-01  1.5000E+03  1.6533E+06
364000.E-01  5.0000E+02  9.0050E+05
368000.E-01  5.0000E+02  3.4200E+05
372000.E-01  2.5000E+02  1.8300E+05
376000.E-01  0.0000E+00  1.3625E+05
380000.E-01  0.0000E+00  6.0250E+04
384000.E-01  0.0000E+00  4.4000E+04
388000.E-01  0.0000E+00  0.0000E+00
392000.E-01  0.0000E+00  0.0000E+00
396000.E-01  0.0000E+00  0.0000E+00
400000.E-01  0.0000E+00  0.0000E+00
